TOYO Cleanroom Series Modules

I. Classification and Models of Cleanroom Series Products

II. Core Technical Features (Class 10 Cleanliness Assurance)

1. Triple Sealing Protection System

• Steel Belt Dust Protection: Special stainless steel belts fully cover the guide rails and ball screws, preventing dust ingress and egress.

• Lip Seals: High-sealing lip seals are installed at both ends of the slider to block internal dust leakage.

• Scraper Plates: Front-end scraper design removes external debris, protecting the internal clean environment.

2. Vacuum Extraction System (Standard for ECH/GCH Series)

• Vacuum extraction nozzles are reserved on both sides of the main body, allowing external connection to a vacuum source to remove particles generated during internal operation.

• The GCH Series can be upgraded to Class 1 cleanliness via the vacuum system, meeting the requirements of high-end semiconductor processes.

• The extraction nozzles are reasonably arranged to ensure uniform airflow and no dead corners for dust retention.

3. Low-Particle-Emission Design and Materials

• The guide rails adopt chain-type ball retainers to reduce particle generation caused by collision and friction between balls (standard for the ECH2 Series).

• Special cleanroom grease (FEP2/NSK G-2) is used, with particle emission 1/10 that of ordinary grease.

• The surface of the aluminum alloy main body undergoes special anodization treatment to reduce electrostatic adsorption and dust shedding.

• The entire series is assembled in TOYO’s cleanroom factory to avoid factory pollution.

4. Performance Benchmarking with Standard Series

• Repeat Positioning Accuracy: ±0.005 mm (ball screw drive)/±0.05 mm (belt drive), consistent with the ETH/ETB Series.

• Maximum Speed: Up to 1000 mm/s for ball screw models and 3000 mm/s for belt-driven models.

• Load Capacity: Ranges from 2 kg (GCH4) to 50 kg (ECH22), covering all application scenarios.

• External Pull-Type Oil Nozzles: Designed on both sides for external lubrication without removing the steel belt, simplifying maintenance.

III. Core Parameters and Application Scenarios of Each Series

1. ECH Series (Standard Cleanroom Ball Screw Stage)

• Structure: Standard ball screw stage+steel belt sealing+vacuum extraction nozzles.

• Lead: 5/10/20 mm (C7-grade precision ball screws).

• Maximum Load: ECH14 (25 kg)/ECH17 (35 kg)/ECH22 (50 kg).

• Applications: Semiconductor placement equipment, packaging equipment, testing instruments, FPD panel handling.

• ECH2 Second-Generation Upgrade: Standard chain-type guide rails, optimized vacuum system, and customizable main body colors.

2. GCH Series (Built-in Rail Cleanroom Stage)

• Structure: Built-in rail design, 30% narrower width, 20% higher rigidity.

• Model Parameters:

• Advantages: Can be installed from top to bottom, saving space; external lubrication design for easy maintenance.

• Applications: Semiconductor wafer handling, medical equipment, precision assembly lines.

3. ECB Series (Cleanroom Belt-Driven Stage)

• Structure: Timing belt drive+steel belt sealing+dust-proof end caps.

• Maximum Speed: 3000 mm/s (ECB22M), suitable for high-speed handling.

• Repeat Positioning Accuracy: ±0.05 mm.

• Applications: Food packaging, high-speed sorting of electronic components, assembly of medical consumables.

4. GTH Series (Low-Profile Built-in Rail Cleanroom Stage)

• Structure: Low-profile design, narrower than the GCH Series, suitable for installation in confined spaces.

• Rigidity: Integrally formed steel main body and slider, 40% higher rigidity.

• Applications: Syringe assembly, minimally invasive surgical instrument production, precision 3C component assembly.

IV. Selection Guide (By Application Scenario)

1. Semiconductor/Wafer Processing (Class 1–10)

• First Choice: GCH Series (built-in rail, upgradeable to Class 1 via vacuum) or ECH2 Series.

• Key Parameters: Repeat positioning accuracy ±0.005 mm, lead 5–10 mm, vacuum extraction mandatory.

• Recommended Models: GCH5/GCH8/ECH17M (with motor mounting flange).

2. FPD Panel Manufacturing (Class 10)

• First Choice: ECH Series (standard type) or ECB Series (high-speed handling).

• Key Parameters: Speed ≥500 mm/s, load 20–35 kg, IP54 dust protection rating.

• Recommended Models: ECH17/ECB17 (balanced speed and precision).

3. Food/Medical Packaging (Class 100)

• First Choice: ECB Series (belt-driven, easy to clean) or GTH Series (low-profile design).

• Key Parameters: Oil-free lubrication option, easy-to-clean structure, corrosion-resistant surface treatment.

• Recommended Models: ECB10/GTH8 (compact, suitable for production line integration).

4. Medical Equipment Assembly (Class 10)

• First Choice: CGCH Series (compact electric cylinder) or GCH4 (light load, high precision).

• Key Parameters: Repeat positioning accuracy ±0.005 mm, low noise (≤55 dB), sterile lubrication.

• Recommended Models: CGCH5/GCH4 (suitable for operation in confined spaces).

V. Installation and Maintenance Key Points

1. Installation Notes

• Cleanroom Operation: Unpack in a Class 100 environment before installation to avoid contamination.

• Vacuum Connection: The ECH/GCH Series needs to be connected to a vacuum source (recommended vacuum degree ≥-0.05 MPa) to ensure extraction efficiency.

• Grounding Treatment: The main body must be reliably grounded to prevent electrostatic dust adsorption.

• Installation Accuracy: The base flatness should be ≤0.02 mm/m to ensure stable operation of the module.

2. Lubrication and Maintenance Specifications

3. Cleaning Process (Refer to the Detailed Cleaning Guide Above)

1. Power off and remove the motor and coupling.

2. Wipe the surface with a 99.9% IPA cleanroom cloth and clean dead corners with an anti-static brush.

3. Use a vacuum cleaner to remove dust; avoid high-pressure air guns that may cause dust dispersion.

4. Allow natural drying for ≥30 minutes before re-lubrication and assembly.

VI. Key Differences from Standard Series (ETH/ETB)

VII. Summary and Selection Recommendations

• Core Value: Through sealing, vacuum, and low-particle-emission technologies, the TOYO Cleanroom Series achieves Class 10 cleanliness, meeting the requirements of high-end manufacturing such as semiconductors.

• Selection Logic:

• High Precision Requirements (±0.005 mm): Choose the ECH/GCH ball screw series.

• High-Speed Handling (>1000 mm/s): Choose the ECB belt-driven series.

• Confined Space Installation: Choose the GCH/GTH built-in rail series.

• Professional Support: For customized Class 1 cleanliness or special length/lead requirements, contact authorized TOYO agents (e.g., Dongguan Oreen Automation) for technical solutions.